| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate alignment device capable of securely performing low-cost suitable alignment operation. <P>SOLUTION: The substrate alignment device 10 according to the present invention has a support surface 15 for supporting a substrate W, a reference pin 11 for positioning provided on the support surface 15, a movable pin 12 to align the substrate W in cooperation with the reference pin 11, a base plate 13 to support the reference pin 11 and movable pin 12 so that they can freely be elevated, an elevation plate 17 which elevates the reference pin 11 and movable pin 12 to the base plate 13 simultaneously, and tilt mechanism (19, 12d) which tilt the movable pin 12 to the reference pin 11 when the movable pin 12 is elevated to the base plate 13 by more than predetermined. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
