MANUFACTURING METHOD OF ELEMENT SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an element substrate where a metal layer having a fine pattern is formed precisely. SOLUTION: The manufacturing method of the element substrate 100 includes: a process for forming a sacrifice layer having a first pattern on a substrate 10; a process for forming a metal layer at the upper portion of the formation and non-formation regions of the sacrifice layer; and a process for forming a metal layer 34 having a second pattern by removing the sacrifice layer by heating. COPYRIGHT: (C)2008,JPO&INPIT