| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and method for recovering a waste chemical fluid capable of facilitating the recovery work of a waste fluid forming an upper layer section in a gelled shape or a semisolid shape. SOLUTION: A coater-side waste fluid tank A11 stores a first waste fluid having a medium-high viscosity i.e., a viscosity of 40 cp or more and containing a first chemical discharged from a coater-side spinner cup 3. A pump 17 for shifting the waste fluid sucks the first waste fluid stored in the coater-side waste fluid tank A11 by a waste fluid carrying first pipe 18, and supplies a developer-side waste fluid tank 12 with the sucked first waste fluid by a waste fluid carrying second pipe 19. The developer-side waste fluid tank 12 stores a second waste fluid having a low viscosity of 10 cp or less containing a second chemical discharged from a developer-side spinner cup 4. The first waste fluid supplied from the coater-side waste fluid tank A11 to the developer-side waste fluid tank 12 is mixed with the second waste fluid for thinning, so that the viscosity is lowered. COPYRIGHT: (C)2008,JPO&INPIT |
