| 摘要 |
<p>Provided are a piezoelectric resonator and a piezoelectric filter for improving heat dissipation and preventing heat from being generated due to spurious vibration. A piezoelectric resonator (10) is provided with a substrate (21) and a thin film section. The thin film section includes a first thin film section (S) supported by the substrate (12), and acoustically isolated second thin film sections (R, L, W) separated from the substrate (12). In the second thin film sections (R, L, W), first and second electrodes (16, 18) are arranged on the both main surfaces of a piezoelectric film (17), respectively, and a vibrating section (24) is formed at an area where the first and the second electrodes (16, 18) overlap each other on the second thin film sections (R, L, W) when viewed through in the film thickness direction. The thin film section has a heat dissipating film (20). The heat dissipating film is in contact with or overlaps the circumferences (18a, 18b, 18c), which are of at least the first electrode or the second electrode and form a part of the outer circumference of the vibrating section (24). The heat dissipating film extends from the circumferences (18a, 18b, 18c) to the first thin film section (S) when viewed through in the film thickness direction.</p> |
