| 摘要 |
AN OBJECT OF THE PRESENT INVENTION IS TO PROVIDE AN APPARATUS FOR REMOVING PARTICLES WHICH EFFECTIVELY ELIMINATES PARTICLES IN THE VACUUM CONTAINER UNIT [10] WITHOUT DEGRADING THE RATE OF OPERATION OF THE PROCESSING DEVICE, AND IS SIMPLE AND INEXPENSIVE TO EMBODY. THE APPARATUS FOR REMOVING PARTICLES IN ACCORDANCE WITH THE PRESENT INVENTION IS FOR A PROCESSING DEVICE INCLUDING A VACUUM CONTAINER UNIT [10] HAVING A PLURALITY OF CHAMBERS [121, 122,123] IN WHICH A PREDETERMINED PROCESS IS PERFORMED ON A WAFER CARRIED IN BY A CONVEYER UNIT [11] IN ATMOSPHERE. THE APPARATUS COMPRISES A CHARGE NEUTRALIZING MEANS FOR NEUTRALIZING CHARGES GENERATED ON A SURFACE OF THE WAFER, THE CHARGE NEUTRALIZING MEANS BEING MOUNTED IN A WAITINGACCOMMODATION UNIT [113] WHICH CONSTITUTES A PART OF THE CONVEYER UNIT [11], AND A CHARGING MEANS FOR ADSORBING PARTICLES IN THE VACUUM CONTAINER UNIT [10] BY ELECTROSTATIC FORCE, THE CHARGING MEANS BEING MOUNTED IN THE VACUUM CONTAINER UNIT [10].(FIG 1)
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