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发明名称
Verbesserte integrierte Halbleiterstruktur für Zuverlässigkeitsprüfungen von Dielektrika
摘要
申请公布号
DE10314503(B4)
申请公布日期
2008.07.31
申请号
DE20031014503
申请日期
2003.03.31
申请人
ADVANCED MICRO DEVICES INC.
发明人
WIECZOREK, KARSTEN;GEILENKEUSER, ROLF;WEIDNER, JOERG-OLIVER
分类号
H01L23/544;H01L21/66
主分类号
H01L23/544
代理机构
代理人
主权项
地址
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