| 摘要 |
PROBLEM TO BE SOLVED: To obtain a droplet discharge head hard to peel off an insulating film from an upper electrode. SOLUTION: A low water permeability insulating film (SiOx film) 38 for preventing the deterioration of a piezoelectric element 18 can be made so as not to be peeled off by protecting an upper electrode 32 by providing an adhesion layer 36 for adhering the upper electrode 32 to the low water permeability insulating film (SiOx film) 38 between the upper electrode 32 of the piezoelectric element 28 and the low water permeability insulating film (SiOx film) 38 for protecting the upper electrode 32. COPYRIGHT: (C)2008,JPO&INPIT
|
