| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for producing ultra pure water capable of almost fully preventing economically the increase of a dissolved oxygen concentration in the ultra pure water and also capable of realizing the reduction of total organic carbon (TOC) therein. SOLUTION: The method and apparatus for producing the ultra pure water produces a first treated water by emitting ultraviolet rays with an ultraviolet ray irradiation device 9 on the water to be treated from which the dissolved oxygen has been eliminated via a vacuum deaeration column 8 in advance, and next produces a second treated water by performing an ion-exchange on the first treated water via a mixed bed ion-exchange column 10, wherein the quantity of the ultraviolet rays to be irradiated is determined based on the result of measurement of at least a TOC concentration in the water to be treated. COPYRIGHT: (C)2008,JPO&INPIT
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