DIAPHRAGM PUMP

摘要

A laser welding section (9), at which a resin diaphragm (21) is joined to a case body (10), is placed at a portion away from a peripheral edge (11a) of a pump chamber (11) with a non-welding region (13) provided between the portion and the peripheral edge, and this sufficiently dissipates heat, which occurs in laser light irradiation, to the case body (10) side. Also, the laser welding section (9) is placed between a peripheral edge (11a) of the pump chamber (11) and an outer peripheral edge (27a) of a movable section (28) of a metal diaphragm (25), and this causes vibration of a piezoelectric element (30) to be reliably produced only by the movable section (28). The construction sufficiently dissipates heat occurring at the time of laser welding, suppressing deformation of the diaphragms caused by heat. Also, because the position where laser welding is applied is appropriately set, the diaphragms sufficiently exhibit their characteristics.