| 摘要 |
A micro-pump is provided to obtain an effect of driving of two divided piezoelectric elements by separating an upper electrode layer or the upper electrode layer and an element layer. A micro-pump includes a thin layer(15), a piezoelectric element(17), and a pump body(11). The piezoelectric element is arranged on the thin layer, deforms the thin layer for pumping fluid, and includes a lower electrode layer(173), an element layer(171), and an upper electrode layer(172). The lower electrode layer is formed on the thin layer with an adhesive. The element layer is formed on the lower electrode layer. The upper electrode layer is formed on the element layer. The pump body forms a pumping chamber(14) with the thin layer and includes inlet and outlet channels(12,13). The inlet channel is connected with the pump chamber having a cross section larger as going to the pumping chamber. The outlet channel is connected with the pump chamber having a cross section larger as going away from the pumping chamber.
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