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发明名称
摘要
申请公布号	JP4126634(B2)	申请公布日期	2008.07.30
申请号	JP19990085773	申请日期	1999.03.29
申请人		发明人
分类号	H01J27/02;H01J27/08;C23C14/48;H01J9/38;H01J27/04;H01J37/08;H01J37/317;H01L21/265	主分类号	H01J27/02
代理机构		代理人
主权项
地址

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