SYSTEMS AND METHODS THAT MITIGATE CONTAMINATION AND MODIFY SURFACE CHARACTERISTICS DURING ION IMPLANTATION PROCESSES THROUGH THE INTRODUCTION OF GASES,申请号EP20060827769-传众专利搜索

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发明名称	SYSTEMS AND METHODS THAT MITIGATE CONTAMINATION AND MODIFY SURFACE CHARACTERISTICS DURING ION IMPLANTATION PROCESSES THROUGH THE INTRODUCTION OF GASES
摘要
申请公布号	EP1949405(A2)	申请公布日期	2008.07.30
申请号	EP20060827769	申请日期	2006.11.10
申请人	AXCELIS TECHNOLOGIES, INC.	发明人	REECE, ROANLD;KONDRATENKO, SERGUEI;RA, GRUMJOO;WAINWRIGHT, LOUIS;CAI, GARY
分类号	H01J37/317	主分类号	H01J37/317
代理机构		代理人
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