METHOD FOR REMOVING ORGANIC ELECTROLUMINESCENT RESIDUES FROM A SUBSTRATE

摘要

A method for removing organic electroluminescent residues from a substrate is provided to extend lifespan of the substrate and increase efficiency of a process in producing an OLED(Organic Light Emitting Diode) by using a dry etching process. A method for removing organic electroluminescent residues from a substrate includes the steps of: providing process gas containing fluorine containing gas, oxygen containing gas, and additive gas; providing reactive species by activating the process gas in a remote chamber by using at least one energy source; and volatilizing and removing the organic electroluminescent residues from a surface of the substrate by contacting the surface of the substrate with the reactive species.