| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge inspection apparatus and the like capable of precisely and efficiently inspecting the discharge performance of a discharge nozzle. SOLUTION: The discharge inspection apparatus for inspecting the discharge nozzle of an introduced functional liquid droplet discharge head has an alignment mask on which a landing position is marked, an inspection sheet taking inspection discharge, a set stage for setting together the alignment mask and the inspection sheet in the Y-axial direction, a landing position recognition means for recognizing a landing reference mark of the alignment mask and the landing position of the functional droplet and a Y-axis table for moving the set stage in the Y-axial direction, wherein the Y-axis table has a first Y-axis table for moving the set stage at high speed and a second Y-axis table for moving the set stage at low speed. COPYRIGHT: (C)2008,JPO&INPIT
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