| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nozzle exchanger performing detection of a nozzle appropriately while containing exchange nozzles with high density. <P>SOLUTION: The nozzle exchange unit 19 comprises a nozzle holding portion 30 having a plurality of nozzle containing holes 31, and nozzle sensors 40a-40d for detecting the nozzles contained in the containing holes 31. Light guide paths 38 corresponding to respective containing holes 31 and traversing the containing holes 31 in the radial direction are formed in the nozzle holding portion 30. The nozzle sensor 40a(-40d) has a common light projecting portion 41a(41c), a prism 42a(-42d) for guiding illumination light from the light projecting portion 41a(41c) to each light guide path 38 while performing spectroscopy, and a light receiving portion 43a(-43d) for receiving the light passed through each light guide path 38. <P>COPYRIGHT: (C)2008,JPO&INPIT |
