| 发明名称 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object |
| 摘要 |
At least one pair of electrode formed on a mounting surface of a stage is in contact with a conductive layer formed on a first surface of an inspection object, and an electrical path is formed between the both by using a fritting phenomenon.
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| 申请公布号 |
US2008174325(A1) |
申请公布日期 |
2008.07.24 |
| 申请号 |
US20080007403 |
申请日期 |
2008.01.10 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
KOMATSU SHIGEKAZU;SUGA TADATOMO;ITOH TOSHIHIRO;KATAOKA KENICHI |
| 分类号 |
G01R31/02;G01R31/26;G01R1/073;G01R31/28;H01L21/66 |
主分类号 |
G01R31/02 |
| 代理机构 |
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代理人 |
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| 地址 |
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