| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding wheel surface adjustment method for removing metal particles adhering to an exposed surface of abrasive grain. SOLUTION: A spattering apparatus 100 includes: a cathode 110 having a brazed grinding wheel 1 where abrasive grain 10 having the exposed surface 11 attached with metal particles 21 is fixed; and an anode 120 where a dummy substrate 2 is disposed, in a vacuum chamber 101. The apparatus 100 brings accelerated positive ions into collision with the metal particles 21 adhering to the exposed surface 11 to remove the metal particles 21. COPYRIGHT: (C)2008,JPO&INPIT
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