DISCHARGE INSPECTION APPARATUS AND DROPLET DISCHARGE APPARATUS, AND METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a discharge inspection apparatus and the like capable of precisely and efficiently inspecting the discharge performance of each discharge nozzle. SOLUTION: The discharge inspection apparatus 55 for inspecting the discharge performance of a number of discharge nozzle 52 by introducing and setting a head unit 1 formed by installing a functional liquid droplet discharge head 4 on a subcarriage 284 is provided with an X-axis table 71 for moving the head unit 1 in the X-axial direction, a Y-axis table 70 having an alignment mask 106 and an inspection sheet S set together in the Y-axial direction and for moving them in the Y-axial direction, a landing position recognition means 75 for recognizing a landing reference mark of the alignment mask 106 and the landing position of the functional droplet and a discharge performance evaluation means for evaluating the discharge performance of each discharge nozzle by comparing the mask position and the actual landing position to each other. COPYRIGHT: (C)2008,JPO&INPIT