MICRO-ELECTRO-MECHANICAL VALVES AND PUMPS AND METHODS OF FABRICATING SAME
摘要
<p>Micro-valves (257) and micro-pumps (400) and methods of fabricating micro- valves (257) and micro-pumps (400). The micro-valves (257) and micro-pumps (400) include electrically conductive diaphragms (155) fabricated from electrically conductive nano-fibers. Fluid flow through the micro-valves (257) and pumping action of the micro-pumps (400) is accomplished by applying electrostatic forces to the electrically conductive diaphragms (155).</p>
申请公布号
WO2007106855(A3)
申请公布日期
2008.07.24
申请号
WO2007US63977
申请日期
2007.03.14
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;FURUKAWA, TOSHIHARU;HAKEY, MARK, C.;HOLMES, STEVEN, J.;HORAK, DAVID, V.;KOBURGER, CHARLES, W.
发明人
FURUKAWA, TOSHIHARU;HAKEY, MARK, C.;HOLMES, STEVEN, J.;HORAK, DAVID, V.;KOBURGER, CHARLES, W.
