| 摘要 |
PROBLEM TO BE SOLVED: To provide a position detection device capable of detecting a position highly accurately. SOLUTION: In this device equipped with a magnetic resistance element whose resistance value is changed by a magnetic field changing by movement of teeth of a gear, a rotation angle position of the gear is detected based on a change of the resistance value of the magnetic resistance element. A plurality of magnetic resistance element bridges constituted of magnetic thin films on the same layer are installed in parallel on a substrate 30, and three or more layers of the magnetic resistance element bridges are laminated so that each part of the magnetic resistance element bridges is overlapped together in the state where silicon oxide films 33, 35, 37, 39 are interposed in the longitudinal direction. COPYRIGHT: (C)2008,JPO&INPIT
|
