MANUFACTURING METHOD OF THIN FILM BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film battery capable of performing heat treatment only a prescribed layer as much as possible.

SOLUTION: In the manufacturing method of the thin film battery, at least one electrode layer of a positive electrode layer 5 and a negative electrode layer 4 and an electrolyte layer 6 coming in contact with the electrode layer are formed. The electrolyte layer 6 coming in contact with the electrode layer is heated by passing electricity to the electrode layer. The electrode layer is heated by Joule heat locally generated by passing electricity to the electrode layer. In accordance with heating of the electrode layer, an adjoined electrolyte layer 6 is heated. By heating the electrolyte layer 6, at least the interface between the electrode layer and the electrolyte layer 6 is modified and resistance can be decreased.

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