| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device and a surface inspection method, capable of inspecting precisely a micro area on a surface of an inspection object. SOLUTION: This surface inspection device 1 is provided with: an electrostatic capacitance detecting part 10 provided with a plurality of detecting electrodes 11, 11, etc, arrayed opposedly on the surface of the inspection object 2, and for detecting an electrostatic capacitance between each of the plurality of detecting electrodes 11, 11, etc, and the inspection object 2; a moving part 30 for moving relatively the capacitance detecting part 10 with respect to the inspection object 2; a relative position detecting part for detecting a relative position of the capacitance detecting part 10 with respect to the inspection object 2; and a shape determination part 50 for determining a shape of the surface of the inspection object 2, based on the electrostatic capacitance between each of the plurality of detecting electrodes 11, 11, etc, detected by the capacitance detecting part 10 and the inspection object 2, and based on the relative position of the capacitance detecting part 10 with respect to the inspection object 2. COPYRIGHT: (C)2008,JPO&INPIT
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