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发明名称
In Sm OXIDE SPUTTERING TARGET
摘要
申请公布号
EP1905864(A4)
申请公布日期
2008.07.23
申请号
EP20060767071
申请日期
2006.06.21
申请人
IDEMITSU KOSAN COMPANY LIMITED
发明人
INOUE, KAZUYOSHI;TANAKA, NOBUO;TOMAI, SHIGEKAZU;MATSUBARA, MASATO;KAIJO, AKIRA;YANO, KOKI
分类号
C23C14/34;C04B35/00;C04B35/50
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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