发明名称 |
Method for connection of an optical element to a mount structure |
摘要 |
The invention relates to a method for connection of an optical element to a mount structure, whereby in a first step the optical element is connected to the mount structure and in a second step the optical element is welded to the mount structure in the region of the connection.
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申请公布号 |
US7400460(B2) |
申请公布日期 |
2008.07.15 |
申请号 |
US20050599784 |
申请日期 |
2005.04.16 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
HOLDERER HUBERT;GELLRICH BERNHARD;REXHAEUSER DIRK |
分类号 |
G02B7/02;B23K1/20;G02B7/00;G03F7/20 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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