发明名称 SYSTEMS AND METHODS TO SHAPE LASER LIGHT AS A HOMOGENEOUS LINE BEAM FOR INTERACTION WITH A FILM DEPOSITED ON A SUBSTRATE
摘要 <p>Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective elongated image in a plane for each lens in the lens array. In addition, the system may include a beam stop having an edge that is positioned in the plane, and a moveable mount rotating a lens of the lens array to vary an alignment between one of the elongated images and the beam stop edge.</p>
申请公布号 KR20080065673(A) 申请公布日期 2008.07.14
申请号 KR20087012671 申请日期 2006.10.20
申请人 CYMER, INC. 发明人 AKINS ROBERT P.;SANDSTROM RICHARD L.
分类号 G02B27/09;G02B27/46 主分类号 G02B27/09
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