摘要 |
A micro-lens, a fabricating method thereof, and an optical device having the same are provided to enhance surface roughness by heating the micro-lens made of glass with an infrared lamp. A fabricating method of a micro-lens(105) includes the steps of: forming a plurality of separated photoresist patterns at an upper part of a substrate(100); reflowing the photoresist patterns in a micro-lens shape by heating the photoresist patterns; forming the micro-lens on the substrate by transferring the micro-lens shape of the photoresist patterns to the surface of the substrate through a dry etching process; and annealing the surface of the micro-lens by irradiating an infrared ray to the substrate.
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