发明名称 MICRO LENS AND FABRICATING METHOD THEREOF AND OPTICAL DEVICE EQUIPPED THE SAME
摘要 A micro-lens, a fabricating method thereof, and an optical device having the same are provided to enhance surface roughness by heating the micro-lens made of glass with an infrared lamp. A fabricating method of a micro-lens(105) includes the steps of: forming a plurality of separated photoresist patterns at an upper part of a substrate(100); reflowing the photoresist patterns in a micro-lens shape by heating the photoresist patterns; forming the micro-lens on the substrate by transferring the micro-lens shape of the photoresist patterns to the surface of the substrate through a dry etching process; and annealing the surface of the micro-lens by irradiating an infrared ray to the substrate.
申请公布号 KR20080064336(A) 申请公布日期 2008.07.09
申请号 KR20070001123 申请日期 2007.01.04
申请人 LG ELECTRONICS INC. 发明人 KIM, YOUNG IL
分类号 G02B3/00;B29D11/00 主分类号 G02B3/00
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