| 摘要 |
PROBLEM TO BE SOLVED: To simplify steps through collecting a sample piece for a TEM or SEM observation from an original sample up to molding it and setting an observation holder, and carry out the steps consistently in a sample treatment chamber. SOLUTION: The sample piece 15 is molded by clipping the original sample 5 at a desired position by using a focused ion beam irradiation optics 2. Next, the sample piece 15 is collected by a detachable sample piece probe 7, and the sample piece probe 7 is moved to an observation-use sample holder 10, and then the observation-use sample holder 10 is taken out of the sample treatment chamber 1 by using an airlock mechanism, thereby preparing the sample simply and quickly. COPYRIGHT: (C)2008,JPO&INPIT
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