发明名称 |
PHOTORESIST COMPOSITION AND PATTERN FORMATION METHOD |
摘要 |
<p>Disclosed is a photoresist composition which does not cause any cracking or the like on a resist pattern during plating even when no plasticizer is contained, and which enables to form a resist film having no wrinkling and a uniform film thickness. Specifically disclosed is a photoresist composition comprising: (A) an alkali-soluble novolac resin wherein one or some of hydrogen atoms contained in a phenolic hydroxyl group is/are substituted by a substituent having a structure represented by the general formula (2); and (B) a photosensitizing agent.</p> |
申请公布号 |
WO2008078447(A1) |
申请公布日期 |
2008.07.03 |
申请号 |
WO2007JP70368 |
申请日期 |
2007.10.18 |
申请人 |
TOKYO OHKA KOGYO CO., LTD.;MASUDA, YASUO;ISHIKAWA, KAORU |
发明人 |
MASUDA, YASUO;ISHIKAWA, KAORU |
分类号 |
G03F7/023;G03F7/38;H01L21/027 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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