| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment device, sure in pushing of a substrate, and capable of surely controlling a distance between the substrate and a discharging electrode whereby capable of improving stabilized quality of products and productivity. SOLUTION: The vacuum treatment device 1 includes a counter electrode 2 provided so as to retain the substrate 8 and the discharging electrode 3 provided so as to be opposed to the counter electrode 2 with a space while an electrode surface 23 opposed to the substrate 8 for the discharging electrode 3 includes a distance retaining board 25 for retaining the distance between the substrate 8 and the surface of discharging electrode 3 when the counter electrode 2 and the discharging electrode 3 are approached. COPYRIGHT: (C)2008,JPO&INPIT
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