THE ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF FABRICATING THE SAME

摘要

An array substrate for an LCD and a manufacturing method thereof are provided to suppress formation of a copper oxide layer formed during exposure to the air by forming a copper nitride layer in the surface of a copper metal layer, and progress etching in a state when the copper nitride layer is formed, thereby preventing patterning faults caused by a difference of an etching rate. A first copper metal layer(103) is formed on a substrate(101). A first copper nitride layer(106) having a first thickness(t1) is formed on the first copper metal layer. A gate line of which the surface is covered with a first copper nitride layer pattern and a gate electrode connected with the gate line are formed by patterning the first copper nitride layer and the first copper metal layer. A gate insulating layer is formed over the front on the first copper nitride layer pattern. A data line is formed. The data line has a second copper nitride layer pattern in its surface, and connected with a source electrode. The data line crosses the gate line. A passivation layer is formed on the second copper nitride layer pattern. The passivation layer has a drain contact hole for exposing the second copper nitride layer pattern on a drain electrode. The second copper nitride layer pattern exposed through the drain contact hole is removed by performing heat treatment. A pixel electrode contacted with the drain electrode through the drain contact hole is formed on the passivation layer.