| 摘要 |
A semiconductor analyzer capable of providing an accurate measured value irrespective of the fluctuation electron beam amount. The semiconductor analyzer, when a semiconductor substrate is irradiated with an electron beam, measures the substrate current induced in the semiconductor substrate. The semiconductor analyzer comprises a semiconductor substrate supporting means for supporting the semiconductor substrate, an electron beam generating means for generating an electron beam, an electron beam detecting means for detecting the amount of the applied electron beam, and a current measuring means for measuring the substrate current induced in the semiconductor substrate and the amount of the electron beam detected by the electron beam detecting means.
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