| 摘要 |
An integrated circuit MEMS(Micro-ElectroMechanical System) antenna structure is provided to support communication by converting outbound data into an outbound symbol stream with a baseband process module. An integrated circuit MEMS antenna structure includes an MEM region, a feed point(604), and a transmission line(606). The MEM region is formed in a 3D shape. The feed point provides an outbound RF(Radio Frequency) signal to the antenna structure for transmission and receives an inbound RF signal from the antenna structure. The transmission line includes a first line and a second line. The first line is in parallel with the second line and electrically connected to the feed point. The 3D shape includes at least one of a rectangle, a horn, and a waveguide to generate an aperture antenna. The feed point is electrically connected to the aperture antenna.
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