发明名称 INDIVIDUALIZING APPARATUS FOR ELECTRONIC COMPONENT MANUFACTURE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an individualizing apparatus for individualizing a sealed substrate to manufacture an electronic component, capable of shortening delivery period, reducing footprint and reducing cost while accepting a requirement specification of users. <P>SOLUTION: An individualizing apparatus S2 for an electronic component has a basic unit including an acceptor A and an individualizing part B and a delivery part C, a cleaner D equipped between the individualizing part B and the delivery part C, and an inspector E equipped to the cleaner D. The individualizing part B is arbitrarily selected depending on a requirement specification of users. A cutting-off mechanism used in the individualizing part B has a rotary blade 7, a waterjet, laser light, a wire saw, a band saw and the like. In addition, the cleaner D and the inspector E equipped to the basic unit are arbitrarily selected and equipped depending on the requirement specification of users, respectively. By equipping the cleaner D and the inspector E to the basic unit having the individualizing part B depending on the requirement specification of users, the individualizing apparatus S2 for an electronic component is configured. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008153565(A) 申请公布日期 2008.07.03
申请号 JP20060342180 申请日期 2006.12.20
申请人 TOWA CORP 发明人 AMAKAWA TAKESHI
分类号 H01L21/56 主分类号 H01L21/56
代理机构 代理人
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