| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for easily producing a fine structure having pores in a nanometer scale. SOLUTION: The method for producing a fine structure comprises: a stage where a projecting part in an electrode is brought into contact with the layer to be subjected to anode oxidation, thereafter, voltage is applied, and an oxidized region is formed in the contact part with the projecting part of the electrode in the layer to be subjected to anode oxidation; a stage where the layer to be subjected to anode oxidation with the oxidized region formed is subjected to anode oxidation, so as to form first pores in the oxidized region; and a stage where the layer to be subjected to anode oxidation is subjected to anode oxidation once more, so as to form second pores different from the first pores in the region other than the oxidized region. COPYRIGHT: (C)2008,JPO&INPIT
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