| 摘要 |
A pressure transducer diaphragm and a manufacturing method of the same are provided to easily manufacture the pressure transducer diaphragm by etching trenches in a substrate defining relatively light and stiff hollow bosses. A method for manufacturing a pressure transducer diaphragm comprises the steps of: etching more than one trench in a first surface of a first substrate; applying the etching resistance to the trench; and etching a cavity in a second opposite surface of a first substrate wherein a diaphragm(10) supported by a frame(12) having more than one hollow boss(14) for stiffening a layer is formed. The step of etching more than one trench has dry etching or wet etching steps. The trenches include inclined side walls and flat bottoms.
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