| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the generation of cracks on the supporting surface of a vacuum chuck. <P>SOLUTION: The vacuum chuck 90 has a base body 11 consisting of ceramics and a suction hole 11a penetrated in the thickness direction of the base body. A high-frequency electrode 12 and a resistance heating element 13 are embedded into the base body 11 as conductors. A gas flowing means is fitted at a site disposing a terminal 14 connected to the high-frequency electrode 12 on the supporting surface of the base body 11. A gas flowing trench 11c formed between the site on the extension of the terminal 14 on the supporting surface of the base body 11 and the opening of the suction hole 11a is used as the gas flowing means. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
