| 发明名称 |
METHOD OF MANUFACTURING MEMS ICS |
| 摘要 |
Methods of manufacturing an integrated circuit incorporating MEMS are provided. The methods include laying out the integrated circuit using a plurality of overlapping reticles.
|
| 申请公布号 |
US2008155826(A1) |
申请公布日期 |
2008.07.03 |
| 申请号 |
US20080047315 |
申请日期 |
2008.03.12 |
| 申请人 |
SILVERBROOK RESEARCH PTY LTD |
发明人 |
PULVER MARK JACKSON;SILVERBROOK KIA |
| 分类号 |
B23P17/00;B41J2/05;G06F21/00;H04L9/00;H04N1/405 |
主分类号 |
B23P17/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
