发明名称 SUBSTRATE STORAGE CONTAINER
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a substrate storage container which prevents an inner side of a container main body from being contaminated and simplifies inspection, repairing and cleaning operations for an engagement means. <P>SOLUTION: An engagement means 6 for engaging a lid member 4 with a container main body 2 is exposed at an outer surface of the container main body 2. With this arrangement, since it is not necessary to store the engaging means 6 within the lid member 4, contaminated substances are not accumulated in the lid member 4 and there occurs no possibility that the contaminated substances enter the container main body 2. This prevents the inside portion of the container main body 2 from being contaminated. Since the engaging means 6 is exposed at the outer surface, inspection, repairing and cleaning operations of the engaging means 6 are facilitated. Since it is not necessary to store the engaging means 6 at the lid member 4, it is not necessary to arrange a space for storing the engaging means 6, and then the lid member 4 is reduced in size. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008150066(A) 申请公布日期 2008.07.03
申请号 JP20060338907 申请日期 2006.12.15
申请人 SHIN ETSU POLYMER CO LTD 发明人 MASUKO HIDEHIRO;KAMATA TOSHIYUKI;TANIGUCHI ATSUSHI
分类号 B65D85/86;H01L21/673 主分类号 B65D85/86
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