| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric thin-film capacitor manufacturing method with which a dielectric thin-film capacitor can be manufactured through simple manufacturing steps, without the risk of a protective layer covering a capacitor portion cracking. SOLUTION: By having a resist pattern over a tapered part further formed on a capacitor body structure and dry etching performed, the terminal portion of the capacitor body structure, constituted by stacking a lower electrode, a dielectric layer and an upper electrode, in this order, is made into a tapered form. Moreover, thermal treatment is performed, after the taper work. COPYRIGHT: (C)2008,JPO&INPIT
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