Image sensors for converting optical pictures into electrical signals, has color filter layer on semiconductor substrate and micro lens system on color filter layer, which has light-insensitive insulating layer

摘要

The image sensor has a color filter layer on a semiconductor substrate and a micro lens system on the color filter layer, which has a light-insensitive insulating layer (13). The microlens system has two types of multiple micro lenses, which are arranged on color filters (11R,11G,11B) in the color filter layer. The two microlenses have different thickness. The color filter layer has a planarization layer. The micro lenses have a protective layer. The protective layer has a low-temperature oxide layer and a spin on glass layer. An independent claim is also included for a method for the production of an image sensor.