Prober for testing semiconductor substrates, has sealing ring that is connected to pressure generation device for inflation with at least two different pressures and is less deformable at higher pressure

摘要

A housing includes two housing parts joined with a sealing ring (36). The sealing ring is connected to a pressure generation device for inflation with at least two different pressures and is less deformable at higher pressure. A semiconductor substrate (1) and the test tips are arranged within the housing that is sealed relative to a surrounding atmosphere.