| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask, in which a supporting substrate on which chips are fixed can be preferably recovered and re-utilized, and its manufacturing method. SOLUTION: In the mask 10 having the supporting substrate 30 holding a plurality of chips 20, alignment marks 33 and 34 are formed by irradiating a position on the way in the thickness direction of the supporting substrate 30 consisting of a sheet glass to modify the glass. Therefore, when any of the plurality of chips 20 is found to be defective and the chips 20 are removed to recover the supporting substrate 30, the mask 10 can be manufactured again by using the recovered supporting substrate 30, since the alignment marks 33 and 34 do not disappear. COPYRIGHT: (C)2008,JPO&INPIT
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