MICRO-ELECTRO-MECHANICAL SYSTEM WITH ACTUATORS

摘要

The invention relates to a micro-electro-mechanical system comprising a ciliary actuator (100) having a flexible electrode unit (FE) and a stationary electrode unit (SE), wherein the flexible electrode unit (FE) can be rolled-up or out according to a voltage (V<SUB>PMA</SUB>) applied between the flexible and the stationary electrode unit (SE). The invention provides means that allow to bring the actuator into a stable intermediate state (INT) between the totally rolled-up (UP) and the totally rolled-out (DWN) state. In one embodiment of the invention, the means comprise the application of a definite voltage and/or the transfer of a definite charge to the actuator. In another embodiment, the stationary electrode unit (SE) is composed of several segments of different drive electrodes (SE1, SE2) that can selectively be activated to roll the actuator (100) to a desired position.