发明名称 METHOD AND APPARATUS FOR CONNECTING AN OPTICAL ELEMENT TO A MOUNT
摘要 The invention relates to a method and an apparatus for connecting an optical element (1) to a mount (2) at at least one connecting point (7) in an integral manner. Here, the optical element (1) and the mount (2) are positioned prior to connection so as to avoid relative movements during the connection to one another using a contact element (3) which is designed as part of the mount (2). As an alternative or in addition, it is possible for a metallic coating which is integrally connected to the mount (2) first to be applied to the optical element (1).
申请公布号 WO2008049574(A3) 申请公布日期 2008.07.03
申请号 WO2007EP09177 申请日期 2007.10.23
申请人 CARL ZEISS SMT AG;SCHOEPPACH, ARMIN;RAU, JOHANNES;FEDOSENKO, GENNADY;GORKHOVER, LEONID;KLOSE, GERHARD;WIESNER, STEFAN;TREFZ, HANS-JOACHIM;WIDMANN, MICHAEL;BINGEL, ULRICH;EKSTEIN, CLAUDIA;ALBRECHT, GUENTER 发明人 SCHOEPPACH, ARMIN;RAU, JOHANNES;FEDOSENKO, GENNADY;GORKHOVER, LEONID;KLOSE, GERHARD;WIESNER, STEFAN;TREFZ, HANS-JOACHIM;WIDMANN, MICHAEL;BINGEL, ULRICH;EKSTEIN, CLAUDIA;ALBRECHT, GUENTER
分类号 C03C27/04;B23K1/005;G02B7/02;G03F7/20 主分类号 C03C27/04
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