| 摘要 |
A sputter for manufacturing an LCD(Liquid Crystal Display) is provided to enable a rod anode to endure its loads more continuously and loads caused by particles, thereby reducing maintenance cost and time loss of a manufacturing process caused by frequency replacement of the rod anode. A vacuum chamber is filled with gas. A susceptor fixes a glass substrate loaded within the vacuum chamber. A target is made from the same material as a thin film deposited onto the glass substrate, and functions as a cathode during plasma discharge. A ground shield functions as an anode during plasma discharge by being applied as a counter electrode of the target. A rod anode(122) is disposed between the susceptor and the target by being fixed to the ground shield, and has reinforced durability by forming embo(122a) in its front. |
