| 摘要 |
<p>A stage device, an exposure apparatus containing the stage device, and a method for preparing a device by using the exposure apparatus are provided to reduce the heat generation of a drive actuator. A stage device comprises a first stage(4); a first actuator which drives the first stage in a first direction; a second stage(15) which is loaded on the first stage; a second actuator which drives the second stage so as to allow the second stage to move to the first state relatively; a first unit which comprises a first moving magnet arranged at the terminal part of the first direction of the first stage and a first fixed magnet facing with the first moving magnet so as to generate the repulsive force to the first moving magnet; and a second unit which comprises a second moving magnet arranged at the both terminal parts of the first direction of the second stage and a second fixed magnet facing with the second moving magnet so as to generate the repulsive force to the second moving magnet.</p> |
