| 摘要 |
The invention relates to a probe card assembly (300) comprising spring probe elements (305); and a package (400) coupled to the probe elements (305), wherein the package includes at least one die (430a-c) with active electronic components, the die (430a-c) electrically connected to the package by a plurality of first compliant interconnects (432a-c), wherein each of the first compliant interconnects is a structural element that is structurally distinct from each of the probe elements (305), and at least one coolant port (442, 444) that allows a coolant to enter the package (400) and directly cool the active electronic components of each die (430a-c) during a testing operation. Therein the probe elements (305) are directly connected to the package (400).
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