THE VACUUM EQUIPMENT INCLUDING AN DUST COLLECTOR

摘要

A vacuum apparatus having a dust collecting apparatus is provided to agglomerate the foreign substances within a chamber by means of an ultra-sonic generator and to discharge the agglomerated matter to the outside easily. A PECVD(Plasma Enhanced Chemical Vapor Deposition) chamber(150) is maintained as a plasma state. A substrate(165) is constructed to the inside of the chamber and seated on the upper portion of a susceptor(160) fixed by a susceptor support member(162). The susceptor plays a role of the first electrode. In the inside of the susceptor, a conduction wire(155) is connected with a heat controller(180) so that the substrate is heated by high temperature through the conduction wire. A target(170) is constructed to the upper portion separated from the susceptor and plays a role of the second electrode. A gas diffuser(185) is constructed to a side of the target and supplies the gas. A vacuum pump(130) is constructed to a side of the chamber. A discharge apparatus(145) is mounted to the inside of the vacuum pump.