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发明名称
Lithographic apparatus and device manufacturing method
摘要
申请公布号
EP1333329(B1)
申请公布日期
2008.07.02
申请号
EP20030250567
申请日期
2003.01.30
申请人
ASML NETHERLANDS B.V.
发明人
MERTENS, JEROEN JOHANNES SOPHIA MARIA
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
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