发明名称 |
PRESSURE SENSOR HAVING A HIGH FULL-SCALE VALUE WITH PACKAGE THEREOF |
摘要 |
<p>A pressure sensor including a pressure-sensor element having a monolithic body of semiconductor material, and a first main face and a second main face acting on which is a stress resulting from a pressure, the value of which is to be determined; and a package enclosing the pressure-sensor element. The package has an inner chamber containing liquid material, and the pressure-sensor element is arranged within the inner chamber in such a manner that the first and second main faces are both in contact with the liquid material. In particular, the liquid material is a silicone gel.</p> |
申请公布号 |
EP1938068(A1) |
申请公布日期 |
2008.07.02 |
申请号 |
EP20050802413 |
申请日期 |
2005.09.16 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
MURARI, BRUNO;RICOTTI, GIULIO;DELLA TORRE, LUIGI;VITALI, ANDREA, LORENZO |
分类号 |
G01L1/02;G01L9/00 |
主分类号 |
G01L1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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